Towards Routine EDX Tomography in Semiconductor Failure Analysis
نویسندگان
چکیده
منابع مشابه
Improved Data Analysis and Reconstruction Methods for STEM-EDX Tomography
1. Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge, CB3 0FS, UK. 2. Université Grenoble Alpes, F-38000 Grenoble, France. 3. CEA, LETI, MINATEC Campus, F-38054 Grenoble, France. 4. Department of Earth Sciences, University of Cambridge, Downing Street, Cambridge, CB2 3EQ, UK. 5. École polytechnique fédérale de Lausanne, SB-CIME, Station ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2019
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927619009838